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EE 4100 - Nano-Fabrication of Integrated Solid State DevicesCredit Hour(s): 3 History, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). CMOS front-end-of-line (FEOL), back-end-of-line (BEOL), surface micromachining and bulk micromachining. Typical VLSI devices and selected RF MEMS. Prerequisite(s): Undergraduate level PHY 2410 Minimum Grade of D and Undergraduate level PHY 2410L Minimum Grade of D and ((Undergraduate level EE 3310 Minimum Grade of D and Undergraduate level EE 3310L Minimum Grade of D) or Undergraduate level PHY 2420 Minimum Grade of D) Enrollment Restrictions: Must be enrolled in one of the following Colleges: College of Egr & Computer Sci. Level: Undergraduate Schedule Type(s): Lecture
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