EE 6100 - Nano-Fabrication of Integrated Solid State Devices


Credit Hour(s): 3
This course covers the history, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). Typical fabrication methods cover CMOS, front-end-of-line (FEOL), back-end-of-line (BEOL), surface and bulk micromachining. Typical VLSI devices and selected RF MEMS are covered.
Enrollment Restrictions: Must be enrolled in one of the following Levels: Graduate, Medical, Professional. Must be enrolled in one of the following Colleges: College of Egr & Computer Sci.

Level: Graduate
Schedule Type(s): Lecture

This course information is from the 2023-2024 Academic Catalog. View this catalog.
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