Fabrication

Equipment

The THz Sensors Laboratory has ~1100 square feet dedicated to fabrication, package, and intergration of THz devices, components and systems.

A list of facilities and equipment is as follows:

1. Class 100 clean room (~260SF) for basic photolithography down to ~1 um.

2. Class 1000 clean room (~835SF)

3. Basic metallization including thermal evaporation

4. Wet-chemical processing including lift-off, etch back

5. Fast Annealing

6. Lapping and polishing down to 100 um

7. Diagnosing, analyzing and imaging capability

8. Reactive-ion etching including plasma ashing